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How Immersion Lithography Revolutionized Semiconductor Technology

How Immersion Lithography Revolutionized Semiconductor Technology

Introduction of Dry and Immersion Lithography

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SEMIVISION
Oct 14, 2024
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How Immersion Lithography Revolutionized Semiconductor Technology
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Lithography is a cutting-edge technique used to create extremely small patterns on semiconductor wafers, enabling the production of next-generation microchips. It uses extremely short wavelengths to improve resolution and patterning precision.

Here is two types of lithography: Dry and Immersion systems

Source: Burn J. Lin

Dry Lithography:

  • In dry lithograph…

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